Holder for polished work and manufacturing method thereof

ABSTRACT

The inner circumferential surface of through holes in a metal plate is chamfered or put to anchor fabrication and a thermoplastic resin is injection molding to the inner circumferential surface of the through hole thereby forming a resin portion over the entire surface of the through hole and the resin portion is removed by grinding while leaving the peripheral portion of the resin portion thereby forming a polished work holding hole. Thus, when a resin portion is formed to the inner circumference of the holding hole in a polished work holder comprising a metal plate, the production is high and the cost is reduced, and the resin portion is not detached from the bonding portion with no use of the adhesive.

TECHNICAL FIELD

The present invention concerns a holder for a polished work used forholding the polished work when disk-shaped polished works includingsemiconductor wafers, aluminum disks or glass disks for hard disks,glass substrates for use in liquid crystal displays and disk-shapedceramics are polished by a surface polishing apparatus, as well as amanufacturing method thereof.

BACKGROUND ART

For example, when disk-shaped polished work comprising, for example, asemiconductor wafer, aluminum disk or glass disk for hard disk, a glasssubstrate for use in a liquid crystal display and disk-shaped ceramicsis polished by a surface polishing apparatus such as a lapping machine,a holder for polished work as shown in FIG. 11 is used for holding thepolished work. The holder 30 for the polished work has several toseveral tens lapped material holding holes 32 for holding the lappedmaterial 31 and has a gear 33 meshing with a sun gear and an internalgear of a surface polishing apparatus.

Known polished work holders can include, for example, metal holderscomprising metal plates such as made of SK steels or stainless steels,holders having resin coating applied on the surface of the metal holders(referred to Japanese Published Unexamined Utility Model Application No.4349/1983) and laminate holders formed by impregnating carbon fiberswith resins (Japanese Published Unexamined Patent Application No.143954/1983). Metal polished work holders comprising metal plate haveworking life ten times or more the polished work holder comprising resinplates developed subsequently in view of the polishing durability buthave a drawback of sometimes damaging the polished work such as crackingor chipping by contact between the metal and the polished work in thework holding hole, which greatly deteriorates the yield of the polishedproduct.

As a countermeasure for preventing such cracking or chipping of thepolished work, a resin portion may be formed along the innercircumference of the work holding hole in which the work holding hole ismanufactured by grinding a resin plate of a thickness identical with themetal plate, fitting the same to the inner circumference of the workholding hole and the surface of contact between the metal and the resinis secured by an adhesive. The polished work holder has an advantageouseffect to some extent in that it can prevent occurrence of flaws such ascracking or chipping to the polished work but it lacks in the bondingreliability and the resin tends to drop easily from the adhesionportion. In addition, it requires a number of complicate manufacturingsteps, is poor in the productivity and increases the cost, so that ithas not yet been used generally.

Accordingly, this invention intends to provide a method of manufacturinga polished work holder and a polished work holder comprising a metalplate, having high productivity and of a reduced cost when a resinportion is formed to the inner circumference of a holding hole and inwhich the resin does not drop of the bonding portion without using theadhesive or the like.

DISCLOSURE OF THE INVENTION

In view of the foregoing situations, the present inventors have made anearnest study and, as a result, have accomplished the present inventionbased on the finding that a polished work holder can be manufactured ata high productivity and at a reduced cost in which resin or resinlamination molding product does not drop off the adhesion portion byproviding a metal plate having through holes formed for holding thepolished work, chamfering the periphery of the through holes partiallyor entirely and then injection molding a resin to the chamfered portionand the penetrated portion of the through holes, or providing aplurality of penetrating recesses to the inner surface of the throughholes, chamfering protrusions defined by the penetrating recessespartially or entirely or forming unevenness on the lateral surface atthe top ends of the protrusions and then injection molding a resin tothe penetrating recesses and the penetrated portion of the throughholes, or laminate molding a prepreg and pressing the same under heatingand pressure, thereby forming a resin or a resin lamination moldingproduct to the formed through holes and then cutting off the same whileleaving a required amount of the resin portion to the innercircumferential portion of the through holes.

The invention (1) provides a polished work holder comprising a metalplate in which through holes are fabricated for holding a polished work,wherein the periphery of the through hole is chamfered partially orentirely and the periphery and the inner circumference thereof arecoated with a resin or a resin lamination molding product.

The invention (2) provides a polished work holder comprising a metalplate in which through holes are fabricated for holding a polished work,wherein a plurality of penetrating recesses are formed to the innersurface of each of through holes, each of protrusions formed by thepenetrating recesses is chamfered partially or entirely or unevenness isformed on the lateral surface at the top end of the protrusion and theperiphery and the inner circumference of each of the through holes arecoated with a resin or a resin lamination molding product.

The invention (3) provides a method of manufacturing a polished workholder, which comprises attaching, to a molding die, a metal platehaving through holes for holding polished works in which the peripheryof the through hole is chamfered partially or entirely, injectionmolding a resin to the through holes including the chamfered portion andthen grinding to remove the resin molded to the through holes whileleaving a resin portion in a required amount to the inner circumferenceof the through holes, thereby forming a polished work holding hole.

The invention (4) provides a method of manufacturing a polished workholder which comprises attaching, to a molding die, a metal plate havingthrough holes for holding polished works in which a plurality ofpenetrating recesses are formed to the inner surface of each of thethrough holes, chamfering each of the protrusions formed by each of thepenetrating recesses partially or entirely or forming unevenness on thelateral surface at the top end of each of the protrusion, injectionmolding a resin to the through hole portion including the penetratingrecess, then grinding to eliminate the resin molded to the through holeswhile leaving the resin portion in a required amount to the innercircumference of the through holes, thereby forming the work holdinghole.

The invention (5) provides a method of manufacturing a polished workholder which comprises chamfering the periphery of through holesfabricated in a metal plate for holding polished work partially orentirely, fitting a thermosetting resin prepreg of a shape conforming tothe through hole into the through hole, subsequently, forming a resinlamination molding product over the entire surface of the through holesby pressing under heating and pressure, then grinding to remove theresin lamination molding product while leaving the resin laminationmolding product in an amount required for the inner circumference of thethrough hole thereby forming a polished work holding hole.

The invention (6) provides a method of manufacturing a polished workholder which comprises forming a plurality of penetrating recesses tothe inner surface of each of through holes fabricated in a metal platefor holding the polished works, chamfering each of protrusions definedby the penetrating recesses partially or entirely or forming unevennesson the lateral surface at the top end of each of the protrusions,fitting a thermosetting resin prepreg conforming to the shape of thethrough hole into the through hole, subsequently, forming a resinlamination molding product over the entire surface of the through holeby pressing under heating and pressure and then grinding to remove theresin lamination molding product while leaving a resin laminationmolding product in an amount required for the inner circumference of thethrough hole, thereby forming the polished work holding hole.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a plan view of a polished work holder in a first embodiment ofthis invention;

FIG. 2 is an enlarged cross sectional view of one holding hole in FIG.1;

FIG. 3 is a fragmentary view of a through hole before injection moldingin the first embodiment;

FIG. 4 is an end view along line A—A in FIG. 2;

FIG. 5 is an end view along line B—B in FIG. 2;

FIG. 6 is a view illustrating another embodiment of a chamfered portionin FIG. 4;

FIG. 7 is an enlarged perspective view before injection molding of athrough holes in a second embodiment;

FIG. 8 is an enlarged perspective view before injection molding ofanother through holes in a second embodiment;

FIG. 9 is an enlarged perspective view before injection molding of otherthrough holes in a second embodiment;

FIG. 10 is a front elevational view in cross section for a portion of aninjection molding die; and

FIG. 11 is an explanatory view of an existent polished work holder.

DETAILED DESCRIPTION

Then, a polished work holder in a first embodiment of the presentinvention is to be explained with reference to FIG. 1 to FIG. 6. Apolished work holder 10 has several to several tens (18 holes in FIG. 1)of work holding holes 1 for holding polished works (not illustrated),and has a driving gear 5 formed at the outer circumference thereof formeshing with a sun gear and an internal gear of a surface polishingapparatus.

The work holding hole 1 has a structure in which a periphery 42 and ainner surf ace 41 of a through hole formed in a metal plate 4 arecovered with a resin 2 (shown by hatched portion in FIG. 2 and dottedchain portion in FIG. 3). The work holding hole 1 of such a structure isformed as described below. That is, circular through holes each havingan inner diameter d₂ larger by 2 to 7 mm than a final inner diameter d₁of the work holding hole are formed at first to the metal plate 4. Thereis no particular restriction on the number of the through holes, whichis properly selected from several holes to several tens holes dependingon the kind of the polished work. Then, penetrating recesses(hereinafter also referred as “anchor”) 6 are formed each at apredetermined pitch p to the inner surface of the circular through holeof the inner diameter d₂. The anchor 6 is an optional constituentelement in this first embodiment but it is preferably disposed forfirmly integrating the resin portion 2 to be injection moldedsubsequently and the metal plate 4. There are no particular restrictionsfor the number, the shape of the recess and the recessed depth of theanchor 6, which are selected properly. In FIG. 2, the anchor 6 isdisposed by the number of 18, the recess has a trapezoidal shape with arecessed depth of (d₃−d₂)/2.

Then, the upper corner or the lower corner on the circumference of thethrough hole (inner diameter (d₂), that is, the upper portion or thelower portion of protrusions 8 formed by a plurality of penetratingrecesses are chamfered at 3, 3. This chamfering prevents the resinportion 2 injection molded subsequently from detaching upwardly ordownwardly. The chamfering may be formed to the upper corner and/orlower corner on the circumference of the through holes (inner diameterd₂). When one of them is chamfered (that is, chamfered only on oneside), it is preferably chamfered such that adjacent protrusions 8 and 8are chamfered one at the upper portion and another at the lower portionalternately for making the resin less detaching from the bonded surface.Each of the chamfering may be disposed continuously over the entirecircumference or may be formed not continuously to a portion of thecircumference. The chamfered portions 3, 3 may be in any shape, forexample, the cross sectional shape of the portion after the chamferingis in a trapezoidal form (FIG. 3), a rectangular form (FIG. 6) and anindefinite shape surrounded with a parabolic curve (not illustrated).Among them, a trapezoidal shape is preferred in view of easyfabrication. When each of the chamfered portions 3, 3 is in thetrapezoidal shape, the chamfering depth (h₁) is preferably from ⅓ ormore to less than ½ for the thickness of the metal plate. Further, whenthe plate thickness is 0.2 mm or less, chamfering is made only on oneside in which the chamfering depth is preferably about from ⅓ or moreand less than ½ of the thickness of the metal plate.

Further, there is no particular restriction on the radial length of thechamfered portion and it is preferably about from 0.1 mm to twice of theplate thickness. Since the chamfered portions 3 and 3 are formed with anaim of preventing detachment of the resin portion to be formed, nostrict accuracy is required for the surface of the chamfered portion andlarger surface roughness is rather preferred for making the adhesionwith the resin firm. Further, there is no particular restriction on thechamfering method and a method of using a grinding wheel is suitablesince this is most simple and convenient, and requires less cost.

Then, a polished work holder as a second embodiment according to thepresent invention is to be explained with reference to FIG. 7 to FIG. 9.FIG. 7 is a fragmentary view of a through hole before injection molding,FIG. 8 is a fragmentary view of another through hole before injectionmolding, and FIG. 9 is a fragmentary view of other through hole beforeinjection molding, respectively. In FIG. 7 to FIG. 9, identicalconstituent elements with those in FIG. 3 carry the same referencenumerals for which explanation is omitted and explanation is to be mademainly for different constitutions. That is, constitutions of FIG. 7 isdifferent from those in FIG. 3 in that the chamfered portion is notpresent at the periphery of the through hole and an oblique groove 81 isformed on the lateral surface 9 at the top end of a protrusion 8 formedby penetration. The slanting of direction the oblique groove 81 isopposite in the oblique groove 8 on the lateral surface 9 at the top endof an adjacent protrusion 8. By making the slanting direction of thegrooves different alternately, the resin less detaches upwardly ordownwardly from the adhesion portion of the through hole. The unevennessformed on the lateral surface 9 at the top end of the protrusion 8 isnot restricted to the oblique groove 81 but may include otherconfiguration, for example, dimple-shaped unevenness (FIG. 8) or anunevenness (FIG. 9) comprising a combination of protrusions 83 a andgrooves 83 b disposed laterally. In this second embodiment, thepenetrating recesses (anchor 6) are essential constituent factor and theprotrusions defined therewith have the unevenness formed on the lateralsurface 9 at the top end of the protrusions 8 as shown in FIG. 7 to FIG.9, and the inner circumference 41 of the through hole is covered with aresin. The resin may be formed not only to the inner circumference 41 ofthe through hole but also to the periphery 42 on the upper surface orthe lower surface of the metal plate in contiguous with the innercircumference 41 as an extremely thin coating. The protrusion 8 may bechamfered partially or entirely (not illustrated). When such chamferingis applied, unevenness on the lateral surface 9 at the top end of theprotrusion 8 may be saved.

In the polished work holder according to the present invention, theperiphery and the inner circumference of the through holes are coatedwith a resin or a resin lamination molding product. The innercircumference of the through hole means the inner end face of thethrough hole and the periphery of the through hole means the vicinity ofthe upper surface or the lower surface of the metal plates in contiguouswith the inner circumference. There is no particular restriction on theresin used and, when the resin coating is manufactured by injectionmolding a thermoplastic resin is preferred, since the thermoplasticresin has excellent injection moldability. Specifically, wholly aromaticliquid crystal polyester (LCP), polybutylene terephthalate (PBT),polyacetal (POM) and polycarbonate (PC) are preferred in view of thestrength, abrasion resistance, chemical resistance and flowability uponmolding.

For the resin, any of straight resins (with no reinforcement) orreinforced resins reinforced with short fiber glass may be used.Straight resin are used in a case where it is necessary to preventscattering of glass powder. Further, polypropylene (PP) is usable sincethis is a most popularized resin and has excellent property in view ofmoldability, chemical resistance and abrasion resistance although theapplicable range is limited in view of the strength. In additionpolyphenylene sulfide (PPS) can be used. Further, in the presentinvention, the resin lamination molding product is prepared byimpregnating a woven fabric or non-woven fabric as a substrate with amatrix thermosetting resin to form a prepreg lamination molding product,which is then pressed under heating and pressure. The matrixthermosetting resin can include, for example, epoxy resin, phenolicresin and diallyl phthalate resin. The substrate to be impregnated withthe thermosetting resin can include glass fibers, polyester fibers suchas liquid crystal aromatic polyester fibers, aramid fibers, cotton andcellulose fibers. The resin content of the prepreg prepared byimpregnating the substrate with the matrix thermosetting resin has noparticular restriction and may be properly controlled depending on thethickness of the resin lamination molding product required after moldingand the impregnation amount is preferably from 30 to 70%.

Then, a first method of manufacturing a polished work holder 10 in thefirst embodiment according to the present invention is to be explainedwith reference to FIG. 10. FIG. 10 is a front elevational view in crosssection for a portion of an injection molding die. A polished workholder 10 is a metal plate 4 in which the periphery of through holeseach of an inner diameter d₂ is partially or entirely chamfered and theholder is mounted to an injection molding die 20 and a resin isinjection molded to the portion of the through holes including thechamfered portions 3, 3. The injection molding die 20 has a three platestructure comprising a fixed die 21, a core die 22 and a movable die 23.For example, a spool 24 is formed at the center of the fixed die 21 anda runner 25 and a gate for injecting resin (not illustrated) is formedto the core die 22. A cavity is defined with the core die 22, themovable die 23 and the through hole of a metal plate put between them.Pin point gates 26 are disposed at three positions to each of thethrough holes (that is, cavity) to improve the resin injection. In thedrawing, P1 and P2 denote parting lines and the metal plate 4 isattached to the parting line P2. There is no particular restriction onthe resin to be injection molding but a thermoplastic resin is preferredin view of easy injection molding. Specifically, those thermoplasticresins described previously can be used.

The resin is molded to the inner circumference or the innercircumference and the periphery of the through hole of the metal plateby injection molding. The resin molded to the inner circumference of thethrough hole is removed by grinding while leaving the resin portion atan appropriate width to the inner circumference of the through holethereby forming a polished work holding hole. The inner diameter is setsome what larger than the outer diameter of the polished work so as tomake the rotational motion smooth during the polishing step of thepolished work. With such a constitution, direct contact between themetal plate and the polished work during polishing process can beavoided to greatly reduce the occurrence of flaws. Further, since themetal plate after use can be re-utilized by removing the resin, themethod is excellent in cost performance.

The method of manufacturing the polished work holder of the secondembodiment is practiced by attaching the metal plate shown in FIG. 7 toFIG. 9 to the molding die and injection molding the resin to the throughholes including the penetrating recesses and the method is alsoconducted in the same manner as the method described above. Further, ina case where the resin is molded over the entire surface of the throughholes of the metal plate by injection molding, the polished work holdingholes are formed in the same manner by grinding to remove the resinwhile leaving the resin portion at an appropriate width to the innercircumference of the through holes.

Then, a second method of manufacturing the polished work holderaccording to the present invention is to be explained. At first, in ametal plate formed with through holes for holding the polished work, theperiphery of the through hole is chamfered partially or entirely toobtain a chamfered through hole as shown in FIG. 3 and then athermosetting resin prepreg laminated by an appropriate number ofsheets, fabricated into the shape of the through hole is fitted into thethrough hole, appending a releasable films on upper and lower surfacesand then forming the resin lamination molding product to the entiresurface of the through hole by hot pressing under heating and pressure.In this state, the through hole is completely closed with the resinlamination molding product and the resin lamination molding product iscoated also to the chamfered portion at the periphery of the throughhole. Then, the resin lamination molding product closing the throughhole is removed by grinding while leaving a necessary amount of theresin lamination molding product at the inner circumference of thethrough hole to form a polished work holding hole of an inner diameterd₁.

Further, also for the through hole formed with penetrating recesses, forexample, as shown in FIG. 7 to FIG. 9, a resin lamination moldingproduct can also be formed to the through hole by the same method asdescribed above and a polished work holding hole of an inner diameter d₁can be formed to the metal plate. According to the second manufacturingmethod, while the number of the steps increases slightly, detachment ofthe resin lamination molding product from the adhesion portion can besuppressed by a simple and convenient method without using adhesives.

EXAMPLE

The present invention is to be explained more in details with referenceto examples but they are merely examples and no way restrict the presentinvention.

Example 1

A stainless steel disk plate of 0.5 mm thickness formed with teeth bythe number of 200 has an outermost diameter of 427 mm and a diameter atthe bottom of the teeth of 417 mm, in which 18 through holes arefabricated. Each through hole had a size of 70 mmφ (d₂) with anchorsbeing formed by the number of 18 at the periphery thereof (FIG. 1 andFIG. 2). The upper corner and the lower corner of the through hole(excepting the anchor) were chamfered by a grinding wheel. The crosssectional shape after the chamfering was as shown in FIG. 3 to FIG. 5 inwhich the chamfering depth (h₂) was about 0.2 mm. Then, the metal platewas attached to the molding die. In FIG. 8, it was attached to themolding die such that the metal plate is situated at P2, that is,sandwiched between the core die and the movable die. The wholly aromaticliquid crystal polyester (“Sumica Super LCP-E7008”: manufactured bySumitomo Chemical) was used and injection molded to obtain a polishedwork holder 1. IS450F manufactured by Toshiba Kikai was used as aninjection molding machine and injection molding was conducted under themolding conditions at a cylinder temperature of 360° C., a dietemperature of 80° C. and for a molding time of 30 sec/1 cycle.

Example 2

A polished work holder 2 was obtained in the same method as in example 1except for using polycarbonate (“YupironS-3000”; manufactured byMitsubishi Engineering Plastics Co.) instead of the wholly aromaticliquid crystal polyester (“Sumica Super-LCP-E7008”; manufactured bySumitomo Chemical Co.). Molding conditions were at a cylindertemperature of 280° C., at a die temperature of 65° C. and for a moldingtime of 30 sec/1 cycle.

Example 3

A polished work holder 3 was obtained in the same method as in Example 1except for using polybutylene terephthalate (“Planack BT-1000”;manufactured by Dainippon Ink Chemical Co.) instead of the whollyaromatic liquid crystal polyester (“Sumica Super-LCP-E7008”;manufactured by Sumitomo Chemical Co.). Molding conditions were at acylinder temperature of 230° C., at a die temperature of 65° C. and fora molding time of 30 sec/1 cycle.

Example 4

A polished work holder 4 was obtained in the same method as in Example 1except for using polyphenylene sulfide (“Daicomp FZ1130”; manufacturedby Dainippon Ink Chemical Co.) instead of the wholly aromatic liquidcrystal polyester (“Sumica Super-LCP-E7008”; manufactured by SumitomoChemical Co.). Molding conditions were at a cylinder temperature of 320°C., at a die temperature of 130° C. and for a molding time of 30 sec/1cycle.

Example 5

A polished work holder 5 was obtained in the same method as in Example 1except for using polyacetal (“Juracon M-450-44”; manufactured byPolyplastics Co.) instead of the wholly aromatic liquid crystalpolyester (“Sumica Super-LCP-E7008”; manufactured by Sumitomo ChemicalCo.). Molding conditions were at a cylinder temperature of 200° C., at adie temperature of 75° C. and for a molding time of 30 sec/1 cycle.

Example 6

A polished work holder 6 was obtained in the same method as in Example 1except for using polypropylene (“Nobren AX568”; manufactured by SumitomoChemical Co.) instead of the wholly aromatic liquid crystal polyester(“Sumica Super-LCP-E7008”; manufactured by Sumitomo Chemical Co.).Molding conditions were at a cylinder temperature of 180° C., at a dietemperature of 50° C. and for a molding time of 30 sec/1 cycle.

Example 7

Bisphenol epoxy resin (“AER8011”; manufactured by Asahi Chiba Co.) wasused as a matrix resin and impregnated into a glass fiber substrate(“KS1220”; manufactured by Kanebo Co.) and dried to prepare a prepregsuch that the thickness after molding was 0.1 mm. It was punched out toa shape conforming the through hole of a metal plate, stacked by fivesheets and fitted into the through hole which was chamfered in the sameshape as that in Example 1. Then, releasable films were appended onupper and lower surfaces thereof, put between two SUS plates, insertedin a molding press and a resin lamination molding product was formedunder heating and pressure to the entire surface of the through hole.The resin lamination molding product formed so as to close the throughhole was removed by grinding while leaving the resin lamination moldingproduct at an appropriate width to the periphery of the through hole anda work holding hole was formed to obtain a polished work holder 7.

Example 8

A phenol resin (molar ratio 1.2, ammonia catalyst used; manufactured bythe applicant's company) was used as a matrix resin and impregnated intoa cotton woven fabric substrate (“BC-500E”; manufactured by Nomura KogyoCo.) and dried to prepare a prepreg such that the thickness after themolding was 0.1 mm. A work holding hole was formed subsequently by thesame methods as those in Example 7 to obtain a polished work holder 8.

Example 9

A diallyl phthalate resin (“DT-170”; manufactured by Toto Kasei Co.) wasused as a matrix resin and impregnated into a polyester woven fabricsubstrate (“T-11263”; manufactured by Teijin Co.) and dried to prepare aprepreg such that the thickness after the molding was 0.1 mm. A workholding hole was formed subsequently by the same methods as those inExample 7 to obtain a polished work holder 9.

Comparative Example 1

A polished work holder 10 was obtained in the same method as in Example1 by using a metal plate not chamfered at the periphery of the throughholes, using polyacetal (“Juracon M-450-44”; manufactured byPolyplastics Co.). The molding conditions were at a cylinder temperatureof 200° C., at a die temperature of 75° C. for a molding time of 30sec/1 cycle.

The polished work holders 1-10 obtained by the methods described abovewere stacked such that they were quite at an identical position and athrough hole of 66 mmφ was fabricated to the center of the resin portionby using a milling machine to form polished work holding holes. Thepolished work holders 1-10 were served to the polishing test shownbelow.

Polishing Test

Aluminum disks were polished by 280 batches repetitively using each oneof the polished work holders and then the test was terminated and thestate of the resin portion in the polished work holding holes and theappearance of the polished product were microscopically observed.“FGL-3700” (manufactured by Fujimi Incorporated) was used as thepolishing solution.

As a result of the polishing test, no cracking and chipping wereobserved in the polished products and no scratches were observed. Theresult of observation for the resin portion of the polished work holderis shown in Table 1. The overall evaluation in the result of Table 1 wasfor the relative judgement of practical usefulness in this applicationuse. Even those with the evaluation by the symbol “Δ”, can be usedpractically to an application use with less load,

TABLE 1 Overall judgement Result of observation Example 1 ⊚ no changeExample 2 ◯ clouded discoloration, corner sagged in all 18 holes Example3 ◯ no change Example 4 ◯ cracks in four holes (no detachment) Example 5⊚ no change Example 6 Δ weaving deformation in 18 holes Example 7 ⊚ nochange Example 8 ⊚ no change Example 9 ⊚ no change Comp. Example 1 Xdetached at 121th batch and primary test was interrupted. Positionaldisplacement in upper/lower direction for 6 holes *In overall judgement,⊚ means very good, ◯ means good, Δ means normal, X means bad.

Industrial Application

In a metal plate in which through holes are fabricated for holdingpolished works as a polished work holder according to the presentinvention, since the periphery of the through holes chamfered partiallyor entirely and the periphery and the inner circumference thereof arecovered with a resin or a resin lamination molding product, or aplurality of anchors are disposed to the inner surface of the throughhole and protrusion formed by the anchors are chamfered partially orentirely and the periphery and the inner circumference of the throughholes are coated with a resin or a resin lamination molding product, thepolished work is not damaged and the resin or the resin laminationproduct is not detached when the polished work is polished. Further,even if the holder can no more be used by the abrasion of the resinportion, since it can be re-utilized by removing the resin portion, itis useful in view of cost and in view of resource saving.

What is claimed is:
 1. A polished work holder comprising a metal platein which through holes are fabricated for holding a polished work,wherein the periphery of the through hole is chamfered partially orentirely and the periphery and the inner circumference thereof arecoated with a resin or a resin lamination molding product.
 2. A polishedwork holder comprising a metal plate in which through holes arefabricated for holding a polished work, wherein a plurality ofpenetrating recesses are formed to the inner surface of each of throughholes, each of protrusions formed by the penetrating recesses ischamfered partially or entirely or unevenness is formed on the lateralsurface at the top end of the protrusion and the periphery and the innercircumference of each of the through holes are coated with a resin or aresin lamination molding product.
 3. The polished work holder as definedin claim 1 or 2, wherein the resin is a thermoplastic resin.
 4. Thepolished work holder as defined in claim 1 or 2, wherein the resin is amaterial selected from the group consisting of a wholly aromatic liquidcrystal polyester (LCP), polybutylene terephthalate (PBT), polyacetal(POM) and polycarbonate (PC).
 5. The polished work holder as defined inclaim 1 or 2, wherein the resin is a reinforced resin reinforced withshort fiber glass or a straight resin with no enforcement.
 6. Thepolished work holder as defined in claim 1 or 2, wherein the resinlamination molding product is formed by pressing under heating andpressure a lamination product of a prepreg in which a matrix resinthermosetting resin is impregnated into a woven fabric or non-wovenfabric as a substrate.